Datasheets, Presentations, Papers, ...

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Datasheets / Brochures

  • Datasheet Source-Mask Optimization (pdf - 200kb)
  • Datasheet MO Exposure Optics (pdf - 200kb)

Presentations

  • Innovative Mask Aligner Lithography for MEMS and Packaging - Semicon Taiwan 2010(pdf - 1900kb)
  • Presentation MO Exposure Optics & Source-Mask Optimization (pdf - 1400kb)

Papers & Publications

  • Talbot Lithography as an Alternative for Contact Lithography for Submicron Features - 2014 (pdf - 706kb)
  • Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks (2014) (pdf - 1062kb)
  • Micro-Optics: Enabling Technology for Illumination Shaping in Optical Lithography - 2014 (pdf - 1344 kb)
  • Lithographic process window optimization for mask aligner proximity lithography - 2014 (pdf - 1345 kb)
  • Advanced mask aligner lithography: new illumination system - Optics Express 2010, Vol 18, N° 20 (pdf - 1500kb)
  • Half-tone proximity lithography - Proc. SPIE 7716 2010 (pdf - 1750kb)
  • Optimization of illumination pupils and mask structures for proximity printing - Microelectron. Eng. (2009), doi:10.1016/j.mee.2009.10.038 (pdf - 530kb)
  • Contact and proximity lithography using 193nm Excimer Laser in Mask Aligner - MNE, Vol 87, 936-939, ISSN 0167-9317 2010 (pdf - 330kb)
  • Special on MO Exposure Optics - SUSS Report 2009 (pdf - 725kb)